Why PEEK/PI in epitaxy
Epitaxy chambers need fixtures that stay dimensionally stable, outgas low and resist the process gases. PEEK and PI meet high-temp and clean requirements better than most plastics.
Component map
PI susceptor support
High-temp, low outgas
PEEK carrier
Rigid, clean, dimension-stable
Wafer clips
PEEK/PI, gentle, pure
Insulators
PI high-temp dielectric
Process fit
| Process | Polymer / part |
|---|---|
| SiC epitaxy | PI susceptor, PEEK carrier |
| CVD / diffusion | PI fixtures, PEEK clips |
| Etch / clean | PEEK/PI holders |
| Test / handling | PEEK fixtures |
Frequently asked questions
Why PI for susceptor parts?
PI stays stable and low-outgas at high temp — key in epitaxy chambers.
Is PEEK clean enough?
Semiconductor-grade PEEK is used for carriers/clips; purity is selected per process.
Can you machine to drawing?
Yes, PEEK/PI fixtures and carriers to drawing.